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Proceedings Paper

Micro-optics on VCSELs using NIR photopolymers
Author(s): V. Bardinal; B. Reig; T. Camps; D. Barat; E. Daran; J. B. Doucet; C. Turck; J. P. Malval; D. J. Lougnot; O. Soppera
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Paper Abstract

Laser beam shaping is a key issue for the photonic integration of VCSEL sources. Most of the techniques proposed to integrate micro-optics elements onto VCSEL devices imply either a hybrid assembly or a photolithography step, whose precision limits the accuracy of lens alignment relatively to the VCSEL source. We present here a new method for self-fabrication of microtips on Vertical-Cavity Surface-Emitting Lasers (VCSELs) by means of Near Infra- Red (NIR) photo-polymerization. This approach is based on a single fabrication step, implementing novel photopolymers sensitive at the lasing wavelength. Consequently the process is triggered by the laser source itself and can be applied easily to VCSEL devices during their electro-optic characterization. The method we have developed for tips fabrication is detailed as well as corresponding optical properties. The applications of this new and simple method concern laser light focusing and collimation for integrated micro-systems, coupling to fibers for optical communications as well as novel micro-probes fabrication for near-field optical microscopy.

Paper Details

Date Published: 12 May 2010
PDF: 12 pages
Proc. SPIE 7716, Micro-Optics 2010, 771607 (12 May 2010); doi: 10.1117/12.853886
Show Author Affiliations
V. Bardinal, Lab. d'Analyse et d'Architecture des Systèmes, CNRS, Univ. de Toulouse (France)
Univ. de Toulouse (France)
B. Reig, Lab. d'Analyse et d'Architecture des Systèmes, CNRS, Univ. de Toulouse (France)
Univ. de Toulouse (France)
T. Camps, Lab. d'Analyse et d'Architecture des Systèmes, CNRS, Univ. de Toulouse (France)
Univ. de Toulouse (France)
D. Barat, Lab. d'Analyse et d'Architecture des Systèmes, CNRS, Univ. de Toulouse (France)
Univ. de Toulouse (France)
E. Daran, Lab. d'Analyse et d'Architecture des Systèmes, CNRS, Univ. de Toulouse (France)
Univ. de Toulouse (France)
J. B. Doucet, Lab. d'Analyse et d'Architecture des Systèmes, CNRS, Univ. de Toulouse (France)
Univ. de Toulouse (France)
C. Turck, Institut de Science des Matériaux de Mulhouse, Univ. de Haute Alsace (France)
J. P. Malval, Institut de Science des Matériaux de Mulhouse, Univ. de Haute Alsace (France)
D. J. Lougnot, Institut de Science des Matériaux de Mulhouse, Univ. de Haute Alsace (France)
O. Soppera, Institut de Science des Matériaux de Mulhouse, Univ. de Haute Alsace (France)


Published in SPIE Proceedings Vol. 7716:
Micro-Optics 2010
Hugo Thienpont; Peter Van Daele; Jürgen Mohr; Hans Zappe, Editor(s)

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