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Proceedings Paper

Fabrication and characterization of high-Q conical polymeric microcavities
Author(s): Mario Hauser; Tobias Grossmann; Simone Schleede; Julian Fischer; Torsten Beck; Christoph Vannahme; Timo Mappes; Heinz Kalt
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Paper Abstract

In this work we present the fabrication and characterization of high-Q microresonators made of low loss, thermoplastic polymer poly(methyl methacrylate) (PMMA), which are directly processed on a silicon substrate. Using this polymer-on-silicon material in combination with a thermal reflow step enables cavities of conical shape and ultra smooth surface, dramatically reducing the optical losses caused by surface scatting of the whispering-gallery-modes (WGMs). The cavity Q factor is above two million in the 1300 nm wavelength range and can theoretically reach values up to ten million in the visible. Finite element simulations show the existence of a variety of higher order radial and axial WGMs explaining the complexity of the transmission spectra measured using a tunable diode laser coupled to a tapered optical fiber waveguide.

Paper Details

Date Published: 13 May 2010
PDF: 7 pages
Proc. SPIE 7716, Micro-Optics 2010, 77161Z (13 May 2010); doi: 10.1117/12.853862
Show Author Affiliations
Mario Hauser, Karlsruhe Institute of Technology (Germany)
Tobias Grossmann, Karlsruhe Institute of Technology (Germany)
Simone Schleede, Karlsruhe Institute of Technology (Germany)
Julian Fischer, Karlsruhe Institute of Technology (Germany)
Torsten Beck, Karlsruhe Institute of Technology (Germany)
Christoph Vannahme, Karlsruhe Institute of Technology (Germany)
Timo Mappes, Karlsruhe Institute of Technology (Germany)
Heinz Kalt, Karlsruhe Institute of Technology (Germany)


Published in SPIE Proceedings Vol. 7716:
Micro-Optics 2010
Hugo Thienpont; Peter Van Daele; Jürgen Mohr; Hans Zappe, Editor(s)

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