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Proceedings Paper

Traceable nanoscale length metrology using a metrological Scanning Probe Microscope
Author(s): Malcolm Lawn; Jan Herrmann; Christopher H. Freund; John R. Miles; Malcolm Gray; Daniel Shaddock; Victoria A. Coleman; Asa K. Jämting
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Paper Abstract

We give an overview of the design and planned operation of the metrological Scanning Probe Microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and highlight the metrological principles guiding the design of the instrument. The mSPM facility is being established as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometer scale and the realization of the SI meter at NMIA. The instrument will provide a measurement volume of 100 μm × 100 μm × 25 μm with a target uncertainty of 1 nm for the position measurement.

Paper Details

Date Published: 3 June 2010
PDF: 8 pages
Proc. SPIE 7729, Scanning Microscopy 2010, 77290L (3 June 2010); doi: 10.1117/12.853788
Show Author Affiliations
Malcolm Lawn, National Measurement Institute of Australia (Australia)
Jan Herrmann, National Measurement Institute of Australia (Australia)
Christopher H. Freund, National Measurement Institute of Australia (Australia)
John R. Miles, National Measurement Institute of Australia (Australia)
Malcolm Gray, National Measurement Institute of Australia (Australia)
Daniel Shaddock, The Australian National Univ. (Australia)
Victoria A. Coleman, National Measurement Institute of Australia (Australia)
Asa K. Jämting, National Measurement Institute of Australia (Australia)


Published in SPIE Proceedings Vol. 7729:
Scanning Microscopy 2010
Michael T. Postek; Dale E. Newbury; S. Frank Platek; David C. Joy, Editor(s)

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