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Proceedings Paper

Investigations of nanostructured porous PbTe films with x-ray diffractometry and reflectometry
Author(s): Sergey P. Zimin; Vladimir M. Vasin; Egor S. Gorlachev; Anatoly P. Petrakov; Sergey V. Shilov
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Paper Abstract

In this work application of x-ray total external reflection method for the determination of the porosity value of PbTe and PbSe epitaxial films on silicon substrates subjected to anodic electrochemical etching in a Norr electrolyte was carried out. It is shown that the porosity values of the films can be in the range of 10-68% depending on the anodizing conditions. Triple-crystal x-ray diffractometry method was utilized for the estimation of quantitative characteristics of the pore dimensions along different directions. Nanometer-range pore dimensions and shape are estimated.

Paper Details

Date Published: 26 February 2010
PDF: 7 pages
Proc. SPIE 7521, International Conference on Micro- and Nano-Electronics 2009, 752114 (26 February 2010); doi: 10.1117/12.853728
Show Author Affiliations
Sergey P. Zimin, Yaroslavl State Univ. (Russian Federation)
Vladimir M. Vasin, Yaroslavl State Univ. (Russian Federation)
Egor S. Gorlachev, Yaroslavl Branch of the Institute of Physics and Technology (Russian Federation)
Anatoly P. Petrakov, Syktyvkar State Univ. (Russian Federation)
Sergey V. Shilov, Syktyvkar State Univ. (Russian Federation)

Published in SPIE Proceedings Vol. 7521:
International Conference on Micro- and Nano-Electronics 2009
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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