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Proceedings Paper

Advanced 3D metrology atomic force microscope with crosstalk eliminated
Author(s): Yueming Hua; Cynthia Coggins; Sung Park; Sang-il Park
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Paper Abstract

The first generation AFM based on piezoelectric tube scanners has high spatial resolution and performs well in qualitative measurements. However, it suffers from poor repeatability and accuracy due to the background curvature and crosstalk between the x-y-z axes, making it inadequate for quantitative metrology. We developed a new AFM platform with a x-y flexure scanner, decoupled from the z scanner, which has a highly orthogonal and flat scan. The high speed z scanner with minimized drive mass provides a fast z servo response, making true non-contact AFM practical. The new AFM can also be used in critical angle measurements of microstructures such as reflective LCD display substrates. The design concept of the new AFM was utilized to measure under-cut structures by intentionally changing the angle of the z scanner, enabling the measurement and imaging of undercut structures as well as vertical sidewalls for the first time in AFM history.

Paper Details

Date Published: 3 June 2010
PDF: 8 pages
Proc. SPIE 7729, Scanning Microscopy 2010, 77290N (3 June 2010); doi: 10.1117/12.853679
Show Author Affiliations
Yueming Hua, Park Systems Inc. (United States)
Cynthia Coggins, Park Systems Inc. (United States)
Sung Park, Park Systems Inc. (United States)
Sang-il Park, Park Systems Corp. (Korea, Republic of)

Published in SPIE Proceedings Vol. 7729:
Scanning Microscopy 2010
Michael T. Postek; Dale E. Newbury; S. Frank Platek; David C. Joy, Editor(s)

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