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Proceedings Paper

Millimeter scale topographical image of highly integrated optical structures using enlarged metrological atomic-force microscopy
Author(s): Suat Topsu; Luc Chassagne; Ahmad Sinno; Pascal Ruaux; Yasser Alayli; Gilles Lerondel; Stéphane Blaize; Auréline Bruyant; Pascal Royer
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Paper Abstract

We developed a home-made sample-holder unit used for 2D nano-positioning with millimeter travelling ranges. For each displacement axis, the system includes a long range travelling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. We chose here to characterize highly integrated optical structures. For this purpose, the sample-holder is integrated into an Atomic Force Microscope in order to perform optical imaging. To demonstrate the overall performances, a millimeter scale optical images have been realized.

Paper Details

Date Published: 14 May 2010
PDF: 7 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180V (14 May 2010); doi: 10.1117/12.853586
Show Author Affiliations
Suat Topsu, Lab. d'Ingéniere des Systèmes de Versailles (France)
Univ. de Versailles (France)
Luc Chassagne, Lab. d'Ingéniere des Systèmes de Versailles (France)
Univ. de Versailles (France)
Ahmad Sinno, Lab. d'Ingéniere des Systèmes de Versailles (France)
Univ. de Versailles (France)
Pascal Ruaux, Lab. d'Ingéniere des Systèmes de Versailles (France)
Univ. de Versailles (France)
Yasser Alayli, Lab. d'Ingéniere des Systèmes de Versailles (France)
Univ. de Versailles (France)
Gilles Lerondel, Institut Charles Delaunay, LNIO (France)
Univ. de Technologie Troyes (France)
Stéphane Blaize, Institut Charles Delaunay, LNIO (France)
Univ. de Technologie Troyes (France)
Auréline Bruyant, Institut Charles Delaunay, LNIO (France)
Univ. de Technologie Troyes (France)
Pascal Royer, Institut Charles Delaunay, LNIO (France)
Univ. de Technologie Troyes (France)


Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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