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Proceedings Paper

Pushing the envelope with SEM/SDD-EDS mapping: X-ray spectrum image mapping in 30 seconds or less, but what are the real limits?
Author(s): Dale Newbury
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Paper Abstract

Electron-excited x-ray spectrum image (XSI) elemental mapping can now be performed in remarkably short time, 30 seconds or less, with the silicon drift detector energy dispersive x-ray spectrometer (SDD-EDS). Major constituents (concentration, C > 0.1 mass fraction) and minor constituents (0.01 < C < 0.1) can be mapped with such short duration scans, and trace constituents (C < 0.01) can often be mapped in 300 second scans. Constraints imposed by the older Si(Li)-EDS are greatly reduced with the new SDD-EDS technology, enlarging the range of application of elemental mapping. While high speed mapping has numerous applications, mapping times up to 30 minutes duration are useful for higher pixel density that can reveal unexpected fine spatial details, finer than the x-ray interaction volume appears to permit. Longer duration SDD-EDS mapping enables recording a deeper x-ray gray scale, permitting compositional contrast to be observed at much lower values for major, minor, and trace constituents.

Paper Details

Date Published: 3 June 2010
PDF: 9 pages
Proc. SPIE 7729, Scanning Microscopy 2010, 77290F (3 June 2010); doi: 10.1117/12.853519
Show Author Affiliations
Dale Newbury, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 7729:
Scanning Microscopy 2010
Michael T. Postek; Dale E. Newbury; S. Frank Platek; David C. Joy, Editor(s)

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