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Proceedings Paper

Plasma parameters and active particles kinetics in HBr dc glow discharges
Author(s): A. Smirnov; A. Efremov; V. Svettsov; A. Islyaykin
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Paper Abstract

The study of the direct current (dc) glow discharge plasma parameters and active species kinetics in HBr (p=30-250 Pa, id=10-30 mA) was carried out using the 0-dimensional self-consistent steady-state model. The model included the Boltzmann kinetic equation, the balance equations for both neutral and charge particles, plasma conductivity equation and the quasi-neutrality conditions for volume densities of charged particles as well as for their fluxes to the reactor walls. The final set of cross-sections of electron impact processes for HBr molecules was optimized based on the recent literature data. The data on the steady-state electron energy distribution function, electron gas characteristics (mean energy, drift rate and transport coefficients) and volume-averaged densities of plasma active species were obtained as functions of gas pressure and discharge current.

Paper Details

Date Published: 26 February 2010
PDF: 7 pages
Proc. SPIE 7521, International Conference on Micro- and Nano-Electronics 2009, 752108 (26 February 2010); doi: 10.1117/12.853343
Show Author Affiliations
A. Smirnov, Ivanovo State Univ. of Chemistry and Technology (Russian Federation)
Mikron JSC (Russian Federation)
A. Efremov, Ivanovo State Univ. of Chemistry and Technology (Russian Federation)
V. Svettsov, Ivanovo State Univ. of Chemistry and Technology (Russian Federation)
A. Islyaykin, Mikron JSC (Russian Federation)


Published in SPIE Proceedings Vol. 7521:
International Conference on Micro- and Nano-Electronics 2009
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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