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Proceedings Paper

Science and technology of MEMS/NEMS resonators: Si versus diamond platform materials
Author(s): Mingke Xiong; I-Tsang Wu; Mian Wei; Jing Wang
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Paper Abstract

Having recently been demonstrated at frequencies over 1GHz with measured Q's>10,0001-6, MEMS/NEMS resonators in silicon, SiC and CVD diamond structural materials have great potential for enabling resonant mass sensing down to zeptogram resolution as well as on-chip high-Q passives needed in wireless communication systems for frequency generation, translation and filtering. However, the acceptance of such devices for RF applications in present-day transceivers has been hindered so far by several remaining issues, including: (1) a frequency range lower than 5 GHz, (2) higher motional impedances than normally exhibited by macroscopic high-Q resonators, (3) limited linearity and power handling ability, and (4) insufficient frequency repeatability and stability. This paper reviews several material-centric strategies for alleviating the aforementioned issues. Given that resonance frequency is generally proportional to the acoustic velocity while energy dissipation and Q is also a strong function of the material properties, several deviceoriented and system-level performance-enhancing technologies will be discussed. Both capacitively-transduced and piezoelectrically-transduced resonators will be discussed with a particular emphasis on the employment of transducers with improved electromechanical coupling coefficient as the device-level method for lowering the motional impedance.

Paper Details

Date Published: 5 May 2010
PDF: 15 pages
Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76791O (5 May 2010); doi: 10.1117/12.852893
Show Author Affiliations
Mingke Xiong, Univ. of South Florida (United States)
I-Tsang Wu, Univ. of South Florida (United States)
Mian Wei, Univ. of South Florida (United States)
Jing Wang, Univ. of South Florida (United States)


Published in SPIE Proceedings Vol. 7679:
Micro- and Nanotechnology Sensors, Systems, and Applications II
Thomas George; M. Saif Islam; Achyut Kumar Dutta, Editor(s)

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