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Proceedings Paper

Performance enhancement of µ-bolometer by increasing fill factor
Author(s): Seung-Man Park; Seungoh Han; Chang Hwan Chun; Chang Suk Han
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Paper Abstract

In this paper, the performance enhancing method by increasing optical fill factor of a μ-bolometer is proposed. The main idea of increasing optical fill factor of a μ-bolometer is the reducing the leg area without deteriorating the thermal and electrical properties of its legs. We propose 'the self align leg' structure in order to reduce the leg area without deteriorating electrical and thermal properties. From the analysis, this method can give some benefits, the improvement of responsivity up to 9% and noise equivalent temperature difference 13% through fill factor increasing by 5 to 7%. A new plausible method of increasing fill factor can easily be incorporated with a conventional process without considerable change of process.

Paper Details

Date Published: 3 May 2010
PDF: 6 pages
Proc. SPIE 7660, Infrared Technology and Applications XXXVI, 766013 (3 May 2010); doi: 10.1117/12.852752
Show Author Affiliations
Seung-Man Park, Hoseo Univ. (Korea, Republic of)
Seungoh Han, Hoseo Univ. (Korea, Republic of)
Chang Hwan Chun, Hoseo Univ. (Korea, Republic of)
Chang Suk Han, Hoseo Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 7660:
Infrared Technology and Applications XXXVI
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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