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Proceedings Paper

Development of low dark current SiGe-detector arrays for visible-NIR imaging sensor
Author(s): Ashok K. Sood; Robert A. Richwine; Yash R. Puri; Nicole DiLello; Judy L. Hoyt; Tayo I. Akinwande; Nibir Dhar; Stuart Horn; Raymond S. Balcerak; Thomas G. Bramhall
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Paper Abstract

SiGe based focal plane arrays offer a low cost alternative for developing visible- near-infrared focal plane arrays that will cover the spectral band from 0.4 to 1.6 microns. The attractive features of SiGe based foal plane arrays take advantage of silicon based technology that promises small feature size, low dark current and compatibility with the low power silicon CMOS circuits for signal processing. This paper will discuss performance characteristics for the SiGe based VIS-NIR Sensors for a variety of defense and commercial applications using small unit cell size and compare performance with InGaAs, InSb, and HgCdTe IRFPA's. We will present results on the approach and device design for reducing the dark current in SiGe detector arrays. We will discuss electrical and optical properties of SiGe arrays at room temperature and as a function of temperature. We will also discuss future integration path for SiGe devices with Si-MEMS Bolometers.

Paper Details

Date Published: 3 May 2010
PDF: 7 pages
Proc. SPIE 7660, Infrared Technology and Applications XXXVI, 76600L (3 May 2010); doi: 10.1117/12.852682
Show Author Affiliations
Ashok K. Sood, Magnolia Optical Technologies, Inc. (United States)
Robert A. Richwine, Magnolia Optical Technologies, Inc. (United States)
Yash R. Puri, Magnolia Optical Technologies, Inc. (United States)
Nicole DiLello, Microsystems Technology Labs. (United States)
Judy L. Hoyt, Microsystems Technology Labs. (United States)
Tayo I. Akinwande, Microsystems Technology Labs. (United States)
Nibir Dhar, DARPA/MTO (United States)
Stuart Horn, Night Vision and Electronic Sensors Directorate (United States)
Raymond S. Balcerak, Raymond S. Balcerak LLC (United States)
Thomas G. Bramhall, U.S. Army Aviation and Missile Research, Development and Engineering Ctr. (United States)


Published in SPIE Proceedings Vol. 7660:
Infrared Technology and Applications XXXVI
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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