Share Email Print
cover

Proceedings Paper

Small pixel a-Si/a-SiGe bolometer focal plane array technology at L-3 Communications
Author(s): Charles M. Hanson; Sameer K. Ajmera; John Brady; Thomas Fagan; William McCardel; Diane Morgan; Tom Schimert; A. J. Syllaios; Michael F. Taylor
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Recent developments in low-noise, high temperature coefficient of resistance (TCR) amorphous silicon and amorphous silicon germanium material have led to the development of uncooled focal plane arrays, with TCR in the range 3.2%/K to 3.9%/K, which has been leveraged in the small pixel FPA development at L-3 EOS. In the 17μm pixel technology node at present, 1024x768, 640×480, and 320x240 FPAs have thus far been developed. All three formats employ waferlevel vacuum packaging, with the 1024x768 representing the largest format uncooled FPA wafer-level packaged to date. FPA results from all three formats will be discussed and images will be presented.

Paper Details

Date Published: 28 July 2010
PDF: 9 pages
Proc. SPIE 7660, Infrared Technology and Applications XXXVI, 76600R (28 July 2010); doi: 10.1117/12.852511
Show Author Affiliations
Charles M. Hanson, L-3 Communications Electro-Optical Systems (United States)
Sameer K. Ajmera, L-3 Communications Electro-Optical Systems (United States)
John Brady, L-3 Communications Electro-Optical Systems (United States)
Thomas Fagan, L-3 Communications Electro-Optical Systems (United States)
William McCardel, L-3 Communications Electro-Optical Systems (United States)
Diane Morgan, L-3 Communications Electro-Optical Systems (United States)
Tom Schimert, L-3 Communications Electro-Optical Systems (United States)
A. J. Syllaios, L-3 Communications Electro-Optical Systems (United States)
Michael F. Taylor, L-3 Communications Electro-Optical Systems (United States)


Published in SPIE Proceedings Vol. 7660:
Infrared Technology and Applications XXXVI
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

© SPIE. Terms of Use
Back to Top