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Proceedings Paper

Advances in roll-to-roll imprint lithography for display applications
Author(s): Albert Jeans; Marcia Almanza-Workman; Robert Cobene; Richard Elder; Robert Garcia; Fernando Gomez-Pancorbo; Warren Jackson; Mehrban Jam; Han-Jun Kim; Ohseung Kwon; Hao Luo; John Maltabes; Ping Mei; Craig Perlov; Mark Smith; Carl Taussig; Frank Jeffrey; Steve Braymen; Jason Hauschildt; Kelly Junge; Don Larson; Dan Stieler
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Paper Abstract

A solution to the problems of roll-to-roll lithography on flexible substrates is presented. We have developed a roll-toroll imprint lithography technique to fabricate active matrix transistor backplanes on flexible webs of polyimide that have a blanket material stack of metals, dielectrics, and semiconductors. Imprint lithography produces a multi-level 3- dimensional mask that is then successively etched to pattern the underlying layers into the desired structures. This process, Self-Aligned Imprint Lithography (SAIL), solves the layer-to-layer alignment problem because all masking levels are created with one imprint step. The processes and equipment required for complete roll-to-roll SAIL fabrication will be described. Emphasis will be placed on the advances in the roll-to-roll imprint process which have enabled us to produce working transistor arrays.

Paper Details

Date Published: 2 April 2010
PDF: 12 pages
Proc. SPIE 7637, Alternative Lithographic Technologies II, 763719 (2 April 2010); doi: 10.1117/12.852268
Show Author Affiliations
Albert Jeans, Hewlett-Packard Co. (United States)
Marcia Almanza-Workman, Phicot, Inc. (United States)
Robert Cobene, Hewlett-Packard Co. (United States)
Richard Elder, Hewlett-Packard Co. (United States)
Robert Garcia, Phicot, Inc. (United States)
Fernando Gomez-Pancorbo, Hewlett-Packard Co. (United States)
Warren Jackson, Hewlett-Packard Co. (United States)
Mehrban Jam, Hewlett-Packard Co. (United States)
Han-Jun Kim, Phicot, Inc. (United States)
Ohseung Kwon, Phicot, Inc. (United States)
Hao Luo, Hewlett-Packard Co. (United States)
John Maltabes, Hewlett-Packard Co. (United States)
Ping Mei, Hewlett-Packard Co. (United States)
Craig Perlov, Hewlett-Packard Co. (United States)
Mark Smith, Hewlett-Packard Co. (United States)
Carl Taussig, Hewlett-Packard Co. (United States)
Frank Jeffrey, PowerFilm, Inc. (United States)
Steve Braymen, PowerFilm, Inc. (United States)
Jason Hauschildt, PowerFilm, Inc. (United States)
Kelly Junge, PowerFilm, Inc. (United States)
Don Larson, PowerFilm, Inc. (United States)
Dan Stieler, PowerFilm, Inc. (United States)

Published in SPIE Proceedings Vol. 7637:
Alternative Lithographic Technologies II
Daniel J. C. Herr, Editor(s)

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