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Proceedings Paper

Dynamic characterization of a 2-DOF circular resonator-driven vibratory grating scanner with geometric nonlinearity
Author(s): Yu Du; Guangya Zhou; Fook Siong Chau; Koon Lin Cheo; Qingxin Zhang; Hanhua Feng
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Paper Abstract

A micro-sized 2-DOF grating laser scanner which is made to vibrate in-plane by an electrical comb-driven circular resonator drive is fabricated and tested. The frequency response of the prototype scanner in atmosphere to different driving voltages and the variations of its natural frequency with scanning amplitude are measured. The results are compared with those from finite element simulations using a comprehensive dynamic model, including the effects of geometric nonlinearity of the flexural beams under large deformations. The comparison shows that the predictions made by the developed nonlinear model are generally valid.

Paper Details

Date Published: 14 April 2010
PDF: 9 pages
Proc. SPIE 7522, Fourth International Conference on Experimental Mechanics, 75221S (14 April 2010); doi: 10.1117/12.852070
Show Author Affiliations
Yu Du, National Univ. of Singapore (Singapore)
A*STAR Institute of Microelectronics (Singapore)
Guangya Zhou, National Univ. of Singapore (Singapore)
Fook Siong Chau, National Univ. of Singapore (Singapore)
Koon Lin Cheo, National Univ. of Singapore (Singapore)
Qingxin Zhang, A*STAR Institute of Microelectronics (Singapore)
Hanhua Feng, A*STAR Institute of Microelectronics (Singapore)

Published in SPIE Proceedings Vol. 7522:
Fourth International Conference on Experimental Mechanics
Chenggen Quan; Kemao Qian; Anand Krishna Asundi; Fook Siong Chau, Editor(s)

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