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Proceedings Paper

Fundamentals and technology for monolithically integrated RF MEMS switches with ultra-nanocrystalline diamond dielectric/CMOS devices
Author(s): O. Auciello; A. V. Sumant; C. Goldsmith; S. O'Brien; S. Sampath; C. Gudeman; W. Wang; J. C. M. Hwang; J. Swonger; J. A. Carlisle; S. Balachandran; D. C. Mancini
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Paper Abstract

Most current capacitive RF-MEMS switch technology is based on conventional dielectric materials such as SiO2 and Si3N4. However, they suffer not only from charging problems but also stiction problems leading to premature failure of an RF-MEMS switch. Ultrananocrystalline diamond (UNCD(R) (2-5 nm grains) and nanocrystalline diamond (NCD) (10- 100 nm grains) films exhibit one of the highest Young's modulus (~ 980-1100 GPa) and demonstrated MEMS resonators with the highest quality factor (Q ≥10,000 in air for NCD) today, they also exhibit the lowest force of adhesion among MEMS/NEMS materials (~10 mJ/m2-close to van der Waals' attractive force for UNCD) demonstrated today. Finally, UNCD exhibits dielectric properties (fast discharge) superior to those of Si and SiO2, as shown in this paper. Thus, UNCD and NCD films provide promising platform materials beyond Si for a new generation of important classes of high-performance MEMS/NEMS devices.

Paper Details

Date Published: 5 May 2010
PDF: 9 pages
Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76791K (5 May 2010); doi: 10.1117/12.851491
Show Author Affiliations
O. Auciello, Argonne National Lab. (United States)
A. V. Sumant, Argonne National Lab. (United States)
C. Goldsmith, MEMtronics Corp. (United States)
S. O'Brien, MEMtronics Corp. (United States)
S. Sampath, Innovative Micro Technology (United States)
C. Gudeman, Innovative Micro Technology (United States)
W. Wang, Lehigh Univ. (United States)
J. C. M. Hwang, Lehigh Univ. (United States)
J. Swonger, Peregrine Semiconductor (United States)
J. A. Carlisle, Advanced Diamond Technologies, Inc. (United States)
S. Balachandran, Argonne National Lab. (United States)
D. C. Mancini, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 7679:
Micro- and Nanotechnology Sensors, Systems, and Applications II
Thomas George; M. Saif Islam; Achyut Kumar Dutta, Editor(s)

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