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Proceedings Paper

Compact handheld digital holographic microscopy system development
Author(s): Vijay Raj Singh; Liansheng Sui; Anand Asundi
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Paper Abstract

Development of a commercial prototype of reflection handheld digital holographic microscope system is presented in this paper. The concept is based on lensless magnification using diverging wave geometry and the miniaturized optical design which provides a compact packaged system. The optical geometry design provides the same curvature of object and reference waves and thus phase aberration is automatically compensated. The basic methodology of the system is developed and it further explored for 3D imaging, static deflection and vibration measurements applications. Based on the developed methodology an user-friendly software is developed suitable for industrial shop floor environment. The applications of the system are presented for 3D imaging, static deflection measurement and vibration analysis of MEMS samples. The developed system is well suitable for the testing of MEMS and Microsystems samples, with full-field and real-time features, for static and dynamic inspection and characterization and to monitor micro-fabrication process.

Paper Details

Date Published: 15 April 2010
PDF: 10 pages
Proc. SPIE 7522, Fourth International Conference on Experimental Mechanics, 75224L (15 April 2010); doi: 10.1117/12.851421
Show Author Affiliations
Vijay Raj Singh, Nanyang Technological Univ. (Singapore)
Liansheng Sui, Nanyang Technological Univ. (Singapore)
Xi'an Univ. of Technology (China)
Anand Asundi, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 7522:
Fourth International Conference on Experimental Mechanics
Chenggen Quan; Kemao Qian; Anand Krishna Asundi; Fook Siong Chau, Editor(s)

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