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Proceedings Paper

Carbon-based nano-electro-mechanical systems
Author(s): A. B. Kaul; A. R. Khan; K. G. Megerian; L. Epp; H. G. LeDuc; L. Bagge; A. T. Jennings; D. Jang; J. R. Greer
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Paper Abstract

We provide an overview of our work where carbon-based nanostructures have been applied to twodimensional (2D) planar and three-dimensional (3D) vertically-oriented nano-electro-mechanical (NEM) switches. In the first configuration, laterally oriented single-walled nanotubes (SWNTs) synthesized using thermal chemical vapor deposition (CVD) were implemented for forming bridge-type 2D NEMS switches, where switching voltages were on the order of a few volts. In the second configuration, vertically oriented carbon nanofibers (CNFs) synthesized using plasma-enhanced (PE) CVD have been explored for their potential application in 3D NEMS. We have performed nanomechanical measurements on such vertically oriented tubes using nanoindentation to determine the mechanical properties of the CNFs. Electrostatic switching was demonstrated in the CNFs synthesized on refractory metallic nitride substrates, where a nanoprobe was used as the actuating electrode inside a scanning-electron-microscope. The switching voltages were determined to be in the tens of volts range and van der Waals interactions at these length scales appeared significant, suggesting such structures are promising for nonvolatile memory applications. A finite element model was also developed to determine a theoretical pull-in voltage which was compared to experimental results.

Paper Details

Date Published: 5 May 2010
PDF: 12 pages
Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76790N (5 May 2010); doi: 10.1117/12.851293
Show Author Affiliations
A. B. Kaul, Jet Propulsion Lab. (United States)
A. R. Khan, Jet Propulsion Lab. (United States)
K. G. Megerian, Jet Propulsion Lab. (United States)
L. Epp, Jet Propulsion Lab. (United States)
H. G. LeDuc, Jet Propulsion Lab. (United States)
L. Bagge, Jet Propulsion Lab. (United States)
A. T. Jennings, California Institute of Technology (United States)
D. Jang, California Institute of Technology (United States)
J. R. Greer, California Institute of Technology (United States)


Published in SPIE Proceedings Vol. 7679:
Micro- and Nanotechnology Sensors, Systems, and Applications II
Thomas George; M. Saif Islam; Achyut Kumar Dutta, Editor(s)

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