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Proceedings Paper

Transmission-type angle deviation microscope with NA=0.65 for 3D measurement
Author(s): Ming-Hung Chiu; Chin-Fa Lai; Chen-Tai Tan; Yi-Zhi Lin
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Paper Abstract

Transmission-type laser scanning angle deviation microscopy (TADM) with NA=0.65 for three dimension (3D) measurement is presented. It is based on the theorems of geometrical angular deviation and surface plasmon resonance (SPR) and the use of the common-path heterodyne interferometry. When a laser beam defocuses on the surface of a transparent sample, the transmission light will be deviated a small angle from the optical axis and the deviation angle is proportional to the defocus length and the square of the numerical aperture. We used a SPR angular sensor and the common-path heterodyne interferometry to measure this deviation angle. Scanning the sample, the phase profile was measured and transferred to surface height pattern, the 3D surface profile was obtained in real-time. The results showed that the dynamic range and lateral and axial resolutions were equal to ±5.6 μm, 0.3 μm, and 3 nm, respectively.

Paper Details

Date Published: 3 June 2010
PDF: 7 pages
Proc. SPIE 7729, Scanning Microscopy 2010, 77291G (3 June 2010); doi: 10.1117/12.850984
Show Author Affiliations
Ming-Hung Chiu, National Formosa Univ. (Taiwan)
Chin-Fa Lai, National Formosa Univ. (Taiwan)
Chen-Tai Tan, National Formosa Univ. (Taiwan)
Yi-Zhi Lin, National Formosa Univ. (Taiwan)

Published in SPIE Proceedings Vol. 7729:
Scanning Microscopy 2010
Michael T. Postek; Dale E. Newbury; S. Frank Platek; David C. Joy, Editor(s)

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