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Proceedings Paper

Scaling and application of commercial, feature-rich, modular mixed-signal technology platforms for large format ROICs
Author(s): Arjun Kar-Roy; Marco Racanelli; David Howard; Glenn Miyagi; Mark Bowler; Scott Jordan; Tao Zhang; William Krieger
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Paper Abstract

Today's modular, mixed-signal CMOS process platforms are excellent choices for manufacturing of highly integrated, large-format read out integrated circuits (ROICs). Platform features, that can be used for both cooled and un-cooled ROIC applications, can include (1) quality passives such as 4fFμm2 stacked MIM capacitors for linearity and higher density capacitance per pixel, 1kOhm high-value poly-silicon resistors, 2.8μm thick metals for efficient power distribution and reduced I-R drop; (2) analog active devices such as low noise single gate 3.3V, and 1.8V/3.3V or 1.8V/5V dual gate configurations, 40V LDMOS FETs, and NPN and PNP devices, deep n-well for substrate isolation for analog blocks and digital logic; (3) tools to assist the circuit designer such as models for cryogenic temperatures, CAD assistance for metal density uniformity determination, statistical, X-sigma and PCM-based models for corner validation and to simulate design sensitivity, and (4) sub-field stitching for large die. The TowerJazz platform of technology for 0.50μm, 0.25μm and 0.18μm CMOS nodes, with features as described above, is described in detail in this paper.

Paper Details

Date Published: 3 May 2010
PDF: 12 pages
Proc. SPIE 7660, Infrared Technology and Applications XXXVI, 76603V (3 May 2010); doi: 10.1117/12.850836
Show Author Affiliations
Arjun Kar-Roy, TowerJazz, USA Aerospace and Defense (United States)
Marco Racanelli, TowerJazz, USA Aerospace and Defense (United States)
David Howard, TowerJazz, USA Aerospace and Defense (United States)
Glenn Miyagi, TowerJazz, USA Aerospace and Defense (United States)
Mark Bowler, TowerJazz, USA Aerospace and Defense (United States)
Scott Jordan, TowerJazz, USA Aerospace and Defense (United States)
Tao Zhang, TowerJazz, USA Aerospace and Defense (United States)
William Krieger, TowerJazz, USA Aerospace and Defense (United States)


Published in SPIE Proceedings Vol. 7660:
Infrared Technology and Applications XXXVI
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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