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Proceedings Paper

Enhanced directional sensitivity of a biomimetic MEMS acoustic localization sensor
Author(s): Danny Gee; Haijun Liu; Luke Currano; Miao Yu
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Paper Abstract

We present an improved microfabricated sound localization sensor for unobtrusive surveillance systems inspired by the tympanic membranes of the parasitoid fly, Ormia ochracea. The device consists of two silicon diaphragms mechanically coupled by a suspended beam that amplifies the difference in time response, dependent on the incident angle of the sound source. Fabrication techniques were modified to reduce residual stresses and improve device uniformity. Enhanced acoustic cues for devices with central pivoting anchors were measured with laser Doppler vibrometry. Device responses to weak excitations demonstrated good sensitivity over environmental noise. An order of magnitude in time difference amplification was measured at 90° incident angles with a directional sensitivity of .39μs/degree. These results provide a foundation for realizing an accurate bio-inspired MEMS directional microphone.

Paper Details

Date Published: 28 April 2010
PDF: 8 pages
Proc. SPIE 7682, Photonic Microdevices/Microstructures for Sensing II, 76820N (28 April 2010); doi: 10.1117/12.850418
Show Author Affiliations
Danny Gee, U.S. Army Research Lab. (United States)
Haijun Liu, Univ. of Maryland, College Park (United States)
Luke Currano, U.S. Army Research Lab. (United States)
Miao Yu, Univ. of Maryland, College Park (United States)

Published in SPIE Proceedings Vol. 7682:
Photonic Microdevices/Microstructures for Sensing II
Xudong Fan; Hai Xiao; Anbo Wang, Editor(s)

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