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Proceedings Paper

Sensitivity enhancement of vapor sensors with porous silicon resonant structures
Author(s): Rob N. Candler; Yongha Hwang; Feng Gao
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Paper Abstract

Miniaturization of mass-based resonant sensors is a promising strategy for chemical detection due to the increased sensitivity afforded by decreased length scales. However, while the increased surface area-to-volume ratios of microand nano-scale devices provide sensitivity benefits, smaller scales pose additional challenges in fabrication. We introduce the use of porous silicon resonators to provide increased sensitivity in resonant vapor sensors with minimal fabrication challenge. Standard top-down processes were used to fabricate micrometer-scale resonators with nanometerscale pores. The increased surface area of the porous resonating structures improved their detection sensitivity, and the porous nature of the resonator itself eliminated the need to apply porous coatings separate from the resonator. At present, porous silicon resonators show up to 100% sensitivity enhancement to isopropyl alcohol (vapor) over non-porous silicon resonators. Ongoing work involves investigating the limits of porosity and therefore sensitivity, the tradeoff between porosity and mechanical robustness, and the physics of resonant porous materials.

Paper Details

Date Published: 5 May 2010
PDF: 7 pages
Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76790K (5 May 2010); doi: 10.1117/12.850390
Show Author Affiliations
Rob N. Candler, Univ. of California, Los Angeles (United States)
Yongha Hwang, Univ. of California, Los Angeles (United States)
Feng Gao, Univ. of California, Los Angeles (United States)

Published in SPIE Proceedings Vol. 7679:
Micro- and Nanotechnology Sensors, Systems, and Applications II
Thomas George; M. Saif Islam; Achyut Kumar Dutta, Editor(s)

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