Share Email Print
cover

Proceedings Paper

MEMS and piezo actuator-based Fabry-Perot interferometer technologies and applications at VTT
Author(s): Jarkko Antila; Akseli Miranto; Jussi Mäkynen; Mari Laamanen; Anna Rissanen; Martti Blomberg; Heikki Saari; Jouko Malinen
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Miniaturized spectrometers covering spectral regions from UV to thermal IR are of interest for several applications. For these purposes VTT has for many years been developing tuneable MEMS-based and more recently piezo-actuated Fabry-Perot Interferometers (FPIs). Lately several inventions have been made to enter new wavelengths in the VIS range and enlarge apertures of MEMS devices and also extending the wavelength range of piezo-actuated FPIs. In this paper the background and the latest FPI technologies at VTT are reviewed and new results on components and system level demonstrators are presented. The two FPI technologies are compared from performance and application point of view. Finally insight is given to the further development of next generation devices.

Paper Details

Date Published: 27 April 2010
PDF: 12 pages
Proc. SPIE 7680, Next-Generation Spectroscopic Technologies III, 76800U (27 April 2010); doi: 10.1117/12.850164
Show Author Affiliations
Jarkko Antila, VTT Technical Research Ctr. of Finland (Finland)
Akseli Miranto, VTT Technical Research Ctr. of Finland (Finland)
Jussi Mäkynen, VTT Technical Research Ctr. of Finland (Finland)
Mari Laamanen, VTT Technical Research Ctr. of Finland (Finland)
Anna Rissanen, VTT Technical Research Ctr. of Finland (Finland)
Martti Blomberg, VTT Technical Research Ctr. of Finland (Finland)
Heikki Saari, VTT Technical Research Ctr. of Finland (Finland)
Jouko Malinen, VTT Technical Research Ctr. of Finland (Finland)


Published in SPIE Proceedings Vol. 7680:
Next-Generation Spectroscopic Technologies III
Mark A. Druy; Christopher D. Brown; Richard A. Crocombe, Editor(s)

© SPIE. Terms of Use
Back to Top