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Proceedings Paper

Planar silicon SPADs with improved photon detection efficiency
Author(s): Angelo Gulinatti; Francesco Panzeri; Ivan Rech; Piera Maccagnani; Massimo Ghioni; Sergio D. Cova
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Paper Abstract

We will report on our advances on the development of a new planar silicon SPAD with high photon detection efficiency (PDE) and good photon timing resolution. We will show that a 10μm thick epitaxial layer allows for the absorption of a significant fraction of the incident photons even at the longer wavelengths, while a suitable electric field profile limits the breakdown voltage value and the timing jitter. Simulations show that the new devices can attain a PDE higher than 30% at a wavelength of 800nm.

Paper Details

Date Published: 28 April 2010
PDF: 12 pages
Proc. SPIE 7681, Advanced Photon Counting Techniques IV, 76810M (28 April 2010); doi: 10.1117/12.849664
Show Author Affiliations
Angelo Gulinatti, Politecnico di Milano (Italy)
Francesco Panzeri, Politecnico di Milano (Italy)
Ivan Rech, Politecnico di Milano (Italy)
Piera Maccagnani, IMM-CNR sezione di Bologna (Italy)
Massimo Ghioni, Politecnico di Milano (Italy)
Micro-Photon-Devices (Italy)
Sergio D. Cova, Politecnico di Milano (Italy)
Micro-Photon-Devices (Italy)


Published in SPIE Proceedings Vol. 7681:
Advanced Photon Counting Techniques IV
Mark A. Itzler; Joe C. Campbell, Editor(s)

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