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Proceedings Paper

Resolution enhanced technologies in digital holography
Author(s): G. Pedrini; D. Hopp; U. Gopinathan; W. Osten
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Paper Abstract

We present different systems based on digital holography suitable for the investigation of microscopic objects. A deep UV laser source (193 nm) and high numerical aperture geometry have been used to increase the resolution of the reconstructed amplitude and phase. Furthermore we show how digital holographic interferometry can be used to measure the deformation of microsystems down to the nanometer scale.

Paper Details

Date Published: 31 December 2009
PDF: 9 pages
Proc. SPIE 7388, Ninth International Conference on Correlation Optics, 73880K (31 December 2009); doi: 10.1117/12.849634
Show Author Affiliations
G. Pedrini, Univ. Stuttgart (Germany)
D. Hopp, Univ. Stuttgart (Germany)
U. Gopinathan, Univ. Stuttgart (Germany)
W. Osten, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 7388:
Ninth International Conference on Correlation Optics
Oleg V. Angelsky, Editor(s)

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