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Proceedings Paper

Micro- (and nano-) mechanical signal processors
Author(s): Sunil A. Bhave
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Paper Abstract

With quality factors (Q) often-exceeding 10,000, vibrating micromechanical resonators have emerged as leading candidates for on-chip versions of high-Q resonators used in wireless communications systems. However, as in the case for transistors, extending the frequency of MEMS resonators generally entails scaling of resonator dimensions. Unfortunately, smaller size often coincides with lower-power handling capability and increased motional impedance. In this paper we introduce novel transduction techniques which can improve the motional impedance of MEMS resonators by 1000× over traditional 'air-gap' transduced resonators, present latest results on narrow-bandwidth parametric filters for frequency-agile radio receivers, and discuss performance scaling of NEMS resonators to X-band frequencies.

Paper Details

Date Published: 5 May 2010
PDF: 6 pages
Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76790J (5 May 2010); doi: 10.1117/12.849296
Show Author Affiliations
Sunil A. Bhave, Cornell Univ. (United States)


Published in SPIE Proceedings Vol. 7679:
Micro- and Nanotechnology Sensors, Systems, and Applications II
Thomas George; M. Saif Islam; Achyut Kumar Dutta, Editor(s)

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