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Proceedings Paper

Clamping properties investigation in micro/nano scale experimental mechanics
Author(s): Xide Li; Liang Liu; Dujuan Zeng; Dongchun Su
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Paper Abstract

Creation of strong clamping or gripping becomes a crucial issue in micro and nano scale mechanical experiments. In this paper, several kinds of clamping in micro/nano scale experiments are investigated and compared. Topics include the clamping based on the electron-beam-induced deposition (EBID), the van der Waals interaction, the capillary force, and the electrostatic attractive interaction. The clamping strength and mechanism are analyzed both theoretically and experimentally. The influence of the relative humidity on the micro/nano scale clamping is discussed. The clamping strengths and performances of different clamping methods are also compared considering the size and the material of the clamped objects, and the application environments.

Paper Details

Date Published: 14 April 2010
PDF: 9 pages
Proc. SPIE 7522, Fourth International Conference on Experimental Mechanics, 75221K (14 April 2010); doi: 10.1117/12.849173
Show Author Affiliations
Xide Li, Tsinghua Univ. (China)
Liang Liu, Tsinghua Univ. (China)
Dujuan Zeng, Tsinghua Univ. (China)
Dongchun Su, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 7522:
Fourth International Conference on Experimental Mechanics
Chenggen Quan; Kemao Qian; Anand Krishna Asundi; Fook Siong Chau, Editor(s)

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