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Proceedings Paper

Hyper-NA imaging with solid-immersion optics and induced polarization imaging
Author(s): Jun Zhang; Seung-Hune Yang; Tom D. Milster; Warren Bletscher; Delbert Hansen
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Paper Abstract

Solid immersion lens (SIL) is used in microscopic systems for hyper numerical aperture (NA) imaging. The NA of the SIL microscope can be larger than 2 by using the high refractive index SIL. In this paper, examples of hyper-NA (NA>1.4) imaging are illustrated, including a normal SIL microscope for imaging samples like CPU chips, photomasks which have no cover layer and a special SIL microscope for imaging samples like Blu-Ray optical discs which have cover layer to protect the pattern. In both cases, good contrast images can be achieved by minimizing the system aberration. At the end, characteristics of induced polarization imaging (imaging through crossed polarizers) and a twostep solid immersion lens using Gallium Phosphide (GaP) (NA~2) are discussed.

Paper Details

Date Published: 24 February 2010
PDF: 5 pages
Proc. SPIE 7570, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII, 757012 (24 February 2010); doi: 10.1117/12.848971
Show Author Affiliations
Jun Zhang, College of Optical Sciences, The Univ. of Arizona (United States)
Seung-Hune Yang, Samsung Electronics Co., Ltd. (Korea, Republic of)
Tom D. Milster, College of Optical Sciences, The Univ. of Arizona (United States)
Warren Bletscher, College of Optical Sciences, The Univ. of Arizona (United States)
Delbert Hansen, College of Optical Sciences, The Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 7570:
Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XVII
Jose-Angel Conchello; Carol J. Cogswell; Tony Wilson; Thomas G. Brown, Editor(s)

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