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Proceedings Paper

Sensing of waviness of glossy and rough surface by DOE sensor
Author(s): Raimo Silvennoinen
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Paper Abstract

Theory to sense waviness of glossy surfaces with different roughness utilizing diffractive optical element (DOE) based sensor is introduced, and experimentally verified. The verifications are performed from commercially available surface roughness standards including reamed, turned, vertically and horizontally milled surfaces with different surface roughness up 6.3μm.

Paper Details

Date Published: 31 December 2009
PDF: 8 pages
Proc. SPIE 7388, Ninth International Conference on Correlation Optics, 73880N (31 December 2009); doi: 10.1117/12.848929
Show Author Affiliations
Raimo Silvennoinen, Univ. of Joensuu (Finland)

Published in SPIE Proceedings Vol. 7388:
Ninth International Conference on Correlation Optics
Oleg V. Angelsky, Editor(s)

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