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Proceedings Paper

Micro-machinable polymer-derived ceramic sensors for high-temperature applications
Author(s): Jian Liu; Chengying Xu; Linan An
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Paper Abstract

Micro-sensors are highly desired for on-line temperature/pressure monitoring in turbine engines to improve their efficiency and reduce pollution. The biggest challenge for developing this type of sensors is that the sensors have to sustain at extreme environments in turbine engine environments, such as high-temperatures (>800 °C), fluctuated pressure and oxidation/corrosion surroundings. In this paper, we describe a class of sensors made of polymer-derived ceramics (PDCs) for such applications. PDCs have the following advantages over conventional ceramics, making them particularly suitable for these applications: (i) micromachining capability, (ii) tunable electric properties, and (iii) hightemperature capability. Here, we will discuss the materials and their properties in terms of their applications for hightemperature micro-sensors, and microfabrication technologies. In addition, we will also discuss the design of a heat-flux sensor based on polymer-derived ceramics.

Paper Details

Date Published: 31 March 2010
PDF: 10 pages
Proc. SPIE 7647, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2010, 76470V (31 March 2010); doi: 10.1117/12.848529
Show Author Affiliations
Jian Liu, Univ. of Central Florida (United States)
Chengying Xu, Univ. of Central Florida (United States)
Linan An, Univ. of Central Florida (United States)

Published in SPIE Proceedings Vol. 7647:
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2010
Masayoshi Tomizuka, Editor(s)

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