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Proceedings Paper

Scatterometry simulator for multicore CPU
Author(s): Hirokimi Shirasaki
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Paper Abstract

In this paper, we show Scatterometry simulation software which has the spectroscopy calculation and optimization algorithm systems. We analyze the spectral Scatterometry using the wavelength range of 400nm to around 800nm. The calculation is sped up by parallel computing using a multicore CPU. Threading Building Blocks (TBB) techniques are used in the parallel computing. We calculate the spectroscopy using the rigorous coupled wave analysis (RCWA) which provides a method for calculating the diffraction of electromagnetic waves by periodic grating. A conjugate gradient (CG) method is used to automatically search the data which resembles the given spectrum. In this simulation, we can check the sensitivity for profile measurements. And we provide the results using this simulator.

Paper Details

Date Published: 1 April 2010
PDF: 6 pages
Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 76382V (1 April 2010); doi: 10.1117/12.848331
Show Author Affiliations
Hirokimi Shirasaki, Tamagawa Univ. (Japan)

Published in SPIE Proceedings Vol. 7638:
Metrology, Inspection, and Process Control for Microlithography XXIV
Christopher J. Raymond, Editor(s)

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