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Proceedings Paper

Shaping light: MOEMS deformable mirrors for microscopes and telescopes
Author(s): Thomas Bifano
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Paper Abstract

Micromachined deformable mirrors (DMs) have enabled rapid advances in applications ranging from large telescope astronomy and free space laser communication to biological microscopy and retinal imaging over the past decade. In this talk I describe our efforts at Boston University and at Boston Micromachines Corporation to design, fabricate, and control MOEMS DMs for adaptive optics (AO) applications. Integration of the DMs in AO systems is described, along with results demonstrating unprecedented advances in resolution and contrast in microscopes and telescopes challenged by unavoidable wavefront aberrations. MEMS-DM research offers the rare opportunity to introduce technology that is both more economical and more capable than the state-of-the-art.

Paper Details

Date Published: 18 February 2010
PDF: 8 pages
Proc. SPIE 7595, MEMS Adaptive Optics IV, 759502 (18 February 2010); doi: 10.1117/12.848221
Show Author Affiliations
Thomas Bifano, Boston Univ. Photonics Ctr. (United States)


Published in SPIE Proceedings Vol. 7595:
MEMS Adaptive Optics IV
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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