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Proceedings Paper

Reference material (RM) 8820: a versatile new NIST standard for nanometrology
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Paper Abstract

A new multipurpose instrument calibration standard has been released by NIST. This standard was developed to be used primarily for X and Y scale (or magnification) calibrations of scanning electron microscopes from less than 10 times magnification to more than 300 000 times magnifi cation, i.e., from about 10 mm to smaller than 300 nm range instrument field of view (FOV). This standard is identifi ed as RM 8820. This is a very versatile standard, and it can also be used for calibration and testing of other type of microscopes, such as optical and scanning probe microscopes. Beyond scale calibration, RM 8820 can be used for a number of other applications, some of which will be described in this publication.

Paper Details

Date Published: 2 April 2010
PDF: 11 pages
Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 76381B (2 April 2010); doi: 10.1117/12.848037
Show Author Affiliations
Michael T. Postek, National Institute of Standards and Technology (United States)
Andras E. Vladar, National Institute of Standards and Technology (United States)
William Keery, National Institute of Standards and Technology (United States)
Michael Bishop, International SEMATECH (United States)
Benjamin Bunday, International SEMATECH (United States)
John Allgair, International SEMATECH (United States)


Published in SPIE Proceedings Vol. 7638:
Metrology, Inspection, and Process Control for Microlithography XXIV
Christopher J. Raymond, Editor(s)

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