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Proceedings Paper

Position sensing using an integrated VCSEL and PIN photodetector microsystem
Author(s): A. V. Giannopolous; A. M. Kasten; N. Hardy; T. Jefvert; K. D. Choquette
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Paper Abstract

Compact, non-contact, and low operating power sensors are desirable for position sensing applications. Vertical-cavity surface-emitting lasers integrated monolithically with PIN photodetectors have been designed and fabricated for optical position sensing. This compound semiconductor component has in turn been integrated onto a Si-platform to form a microsystem. Using a metallic grating as a position gauge, the sensor microsystem can measure differences in reflected power from the grating as it travels parallel to the sensors. This measurement technique allows for a high spatial resolution. Calculations indicate that such a device can detect spatial changes on the order of the wavelength of light emitted from the laser. Measurements from the work described here show the potential to use VCSEL/PIN chips to determine position with an accuracy of sub-micron resolution.

Paper Details

Date Published: 5 February 2010
PDF: 7 pages
Proc. SPIE 7615, Vertical-Cavity Surface-Emitting Lasers XIV, 76150C (5 February 2010); doi: 10.1117/12.847343
Show Author Affiliations
A. V. Giannopolous, Univ. of Illinois at Urbana-Champaign (United States)
A. M. Kasten, Univ. of Illinois at Urbana-Champaign (United States)
N. Hardy, Univ. of Illinois at Urbana-Champaign (United States)
T. Jefvert, Univ. of Illinois at Urbana-Champaign (United States)
K. D. Choquette, Univ. of Illinois at Urbana-Champaign (United States)

Published in SPIE Proceedings Vol. 7615:
Vertical-Cavity Surface-Emitting Lasers XIV
James K. Guenter; Kent D. Choquette, Editor(s)

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