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Proceedings Paper

Triple-scale analysis and fabrication of new biocompatible MgSiO3 piezoelectric thin films
Author(s): Hwisim Hwang; Yasutomo Uetsuji; Tsutao Katayama; Eiji Nakamachi
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Paper Abstract

Recently, the lead free piezoelectric material, which should be used for medical devices, such as health monitoring system (HMS) and drug delivery system (DDS), is strongly required. In this study, we discovered a newly designed MgSiO3 thin film, as a biocompatible piezoelectric actuator, by using the first-principles calculation and process crystallography simulation algorithm. At first, crystal structure was calculated by using the first-principles density functional theory. Secondly, the best substrate for MgSiO3 was searched by using the process crystallography simulation. Next, MgSiO3 thin film was generated in our laboratory by using the RF magnetron sputtering apparatus. Finally, crystallographic orientation was obtained by using X-ray diffractometer and the piezoelectric property of thin film was measured by the ferroelectric measurement system. As a result, lattice parameters of MgSiO3 with tetragonal structure were obtained as a=b=0.3449nm and c=0.3538nm, and its aspect ratio was 1.026. Au(111) was chosen as the best substrate, on which MgSiO3 thin film with minimum total energy could be grown. Then, MgSiO3(111) was generated on Au(111)/SrTiO3(110) by using the RF magnetron sputtering apparatus. The piezoelectric strain constant d33 of MgSiO3 thin film generated at 400°C was measured as 219.8pm/V and it was higher than one of the existing piezoelectric material BaTiO3. Consequently, we succeeded the generation of a new biocompatible MgSiO3 piezoelectric thin film, which can be applied to medical devices in the future.

Paper Details

Date Published: 31 March 2010
PDF: 9 pages
Proc. SPIE 7644, Behavior and Mechanics of Multifunctional Materials and Composites 2010, 76440D (31 March 2010); doi: 10.1117/12.847277
Show Author Affiliations
Hwisim Hwang, Doshisha Univ. (Japan)
Yasutomo Uetsuji, Osaka Institute of Technology (Japan)
Tsutao Katayama, Doshisha Univ. (Japan)
Eiji Nakamachi, Doshisha Univ. (Japan)


Published in SPIE Proceedings Vol. 7644:
Behavior and Mechanics of Multifunctional Materials and Composites 2010
Zoubeida Ounaies; Jiangyu Li, Editor(s)

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