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Proceedings Paper

A novel free-space MEMS-based variable optical delay line
Author(s): M. A. Basha; N. Dechev; S. Safavi-Naeini; S. Chaudhuri
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Paper Abstract

This paper describes a novel design for a variable optical delay line (ODL) based on modified version of a recently developed MEMS-based 3-D rotating inclined micromirror (3DRIM). The 3DRIM is created by assembling a micromirror onto the top of a rotary comb-drive motor. The comb-drive motor is able to achieve a few degrees of rotation. The new ODL architecture uses two such 3DRIMs located inside a rectangular cavity with mirrored walls. Light from an input fiber is redirected by the 3DRIMs, and caused to reflect within the cavity a number of times, depending on the rotational angle of the 3DRIMs. In this way, the ODL can achieve variable optical delays of up to 3.7 nsec.

Paper Details

Date Published: 18 February 2010
PDF: 8 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759410 (18 February 2010); doi: 10.1117/12.847197
Show Author Affiliations
M. A. Basha, Univ. of Waterloo (Canada)
N. Dechev, Univ. of Victoria (Canada)
S. Safavi-Naeini, Univ. of Waterloo (Canada)
S. Chaudhuri, Univ. of Waterloo (Canada)


Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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