Share Email Print
cover

Proceedings Paper

Effect of bandwidth and numerical aperture in optical scatterometry
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We consider the effects of finite spectral bandwidth and numerical aperture in scatterometry measurements and discuss efficient integration methods based upon Gaussian quadrature in one dimension (for spectral bandwidth averaging) and two dimensions inside a circle (for numerical aperture averaging). Provided the wavelength is not near a Wood's anomaly for the grating, we find that the resulting methods converge very quickly to a level suitable for most measurement applications. In the vicinity of a Wood's anomaly, however, the methods provide rather poor behavior. We also describe a method that can be used to extract the effective spectral bandwidth and numerical aperture for a scatterometry tool. We find that accounting for spectral bandwidth and numerical aperture is necessary to obtain satisfactory results in scatterometry.

Paper Details

Date Published: 1 April 2010
PDF: 10 pages
Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 76381F (1 April 2010); doi: 10.1117/12.846776
Show Author Affiliations
Thomas A. Germer, National Institute of Standards and Technology (United States)
Heather J. Patrick, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 7638:
Metrology, Inspection, and Process Control for Microlithography XXIV
Christopher J. Raymond, Editor(s)

© SPIE. Terms of Use
Back to Top