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Proceedings Paper

Improved scanner matching using scanner fleet matcher (SFM)
Author(s): Shian-Huan Cooper Chiu; Chin-Lung Lee; Sheng-Hsiung Yu; Kai-Lin Fu; Min-Hin Tung; Po-Chih Chen; Chao-Tien Huang; Chien-Chun Elsie Yu; Chin-Chou K. Huang; John C. Robinson; David Tien
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Paper Abstract

This project is the continuation of work reported previously at this conference (Yu, et. al., SPIE 2009). A new software tool for developing a static scanner fleet matching (SFM) matrix is tested including fleet snapshot and scanner pair drilldown. In addition the latest scanner models can adjust the distortion performance dynamically, at run-time, improving effective overlay performance of the scanner fleet, and allowing more flexibility for mix-and match exposure. The goal is to improve overlay |mean|+3s significantly between scanners for critical layer pairs.

Paper Details

Date Published: 1 April 2010
PDF: 7 pages
Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 76382A (1 April 2010); doi: 10.1117/12.846667
Show Author Affiliations
Shian-Huan Cooper Chiu, Rexchip Electronics Corp. (Taiwan)
Chin-Lung Lee, Rexchip Electronics Corp. (Taiwan)
Sheng-Hsiung Yu, Rexchip Electronics Corp. (Taiwan)
Kai-Lin Fu, Rexchip Electronics Corp. (Taiwan)
Min-Hin Tung, Rexchip Electronics Corp. (Taiwan)
Po-Chih Chen, Rexchip Electronics Corp. (Taiwan)
Chao-Tien Huang, KLA-Tencor Taiwan (Taiwan)
Chien-Chun Elsie Yu, KLA-Tencor Taiwan (Taiwan)
Chin-Chou K. Huang, KLA-Tencor Corp. (United States)
John C. Robinson, KLA-Tencor Corp. (United States)
David Tien, KLA-Tencor Corp. (United States)

Published in SPIE Proceedings Vol. 7638:
Metrology, Inspection, and Process Control for Microlithography XXIV
Christopher J. Raymond, Editor(s)

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