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Proceedings Paper

OPC on a single desktop: a GPU-based OPC and verification tool for fabs and designers
Author(s): Ilhami Torunoglu; Ahmet Karakas; Erich Elsen; Curtis Andrus; Brandon Bremen; Pururav Thoutireddy
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Paper Abstract

A computational lithography solution addressing accuracy, speed and affordability requirements is presented. In particular, the cost of computational hardware should be affordable and that the speed and accuracy of the algorithm should be sufficient to complete a full-chip computation overnight. Given the issues associated with present tools, the presented solution uses graphic processors (GPUs) as well as CPUs as computation hardware to achieve a breakthrough improvement in speed and affordability. Scalability to large scale clusters has been addressed so that the solution can be simultaneously used by chip designers as well as manufacturers to provide consistency.

Paper Details

Date Published: 2 April 2010
PDF: 10 pages
Proc. SPIE 7641, Design for Manufacturability through Design-Process Integration IV, 764114 (2 April 2010); doi: 10.1117/12.846636
Show Author Affiliations
Ilhami Torunoglu, Gauda Inc. (United States)
Ahmet Karakas, Gauda Inc. (United States)
Erich Elsen, Gauda Inc. (United States)
Curtis Andrus, Gauda Inc. (United States)
Brandon Bremen, Gauda Inc. (United States)
Pururav Thoutireddy, Gauda Inc. (United States)

Published in SPIE Proceedings Vol. 7641:
Design for Manufacturability through Design-Process Integration IV
Michael L. Rieger; Joerg Thiele, Editor(s)

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