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Proceedings Paper

Process sizing aware flow for yield calculation
Author(s): Chi-Min Yuan
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Paper Abstract

Layout sizing in the mask preparation step is commonly used on critical layers to improve printing process windows. The current flow of yield calculation based on critical areas of a layout typically does not take into account this sizing step. In this paper, we propose a new and simple flow that accounts for the sizing to improve the accuracy of yield calculation. We compare the calculated results using the current and sizing-aware flow to demonstrate the differences. We also show that results from the sizing-aware flow better match the calculated circuit switching power, which already takes into account this sizing step.

Paper Details

Date Published: 2 April 2010
PDF: 8 pages
Proc. SPIE 7641, Design for Manufacturability through Design-Process Integration IV, 76410E (2 April 2010); doi: 10.1117/12.846607
Show Author Affiliations
Chi-Min Yuan, Freescale Semiconductor, Inc. (United States)

Published in SPIE Proceedings Vol. 7641:
Design for Manufacturability through Design-Process Integration IV
Michael L. Rieger; Joerg Thiele, Editor(s)

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