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Proceedings Paper

Novel continuously shaped diffractive optical elements enable high efficiency beam shaping
Author(s): Yuri V. Miklyaev; Waleri Imgrunt; Vladimir S. Pavelyev; Denis G. Kachalov; Tanja Bizjak; Lutz Aschke; Vitalij N. Lissotschenko
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Paper Abstract

LIMO's unique production technology is capable to manufacture free form surfaces on monolithic arrays larger than 250 mm with high precision and reproducibility. Different kinds of intensity distributions with best uniformities or customized profiles have been achieved by using LIMO's refractive optical elements. Recently LIMO pushed the limits of this lens production technology and was able to manufacture first diffractive optical elements (DOEs) based on continuous relief's profile. Beside for the illumination devices in lithography, DOEs find wide use in optical devices for other technological applications, such as optical communications, laser technologies and data processing. Classic lithographic technologies lead to quantized (step-like) profiles of diffractive micro-reliefs, which cause a decrease of DOE's diffractive efficiency. The newest development of LIMO's microlens fabrication technology allows us to make a step from free programmable microlens profiles to diffractive optical elements with high efficiency. Our first results of this approach are demonstrated in this paper. Diffractive beam splitters with continuous profile are fabricated and investigated. The results of profile measurements and intensity distribution of the diffractive beam splitters are given. The comparison between theoretical simulations and experimental results shows very good correlation.

Paper Details

Date Published: 3 March 2010
PDF: 7 pages
Proc. SPIE 7640, Optical Microlithography XXIII, 764024 (3 March 2010); doi: 10.1117/12.846573
Show Author Affiliations
Yuri V. Miklyaev, LIMO Lissotschenko Mikrooptik GmbH (Germany)
Waleri Imgrunt, LIMO Lissotschenko Mikrooptik GmbH (Germany)
Vladimir S. Pavelyev, Image Processing Systems Institute (Russian Federation)
Denis G. Kachalov, Samara State Aerospace Univ. (Russian Federation)
Tanja Bizjak, LIMO Lissotschenko Mikrooptik GmbH (Germany)
Lutz Aschke, LIMO Lissotschenko Mikrooptik GmbH (Germany)
Vitalij N. Lissotschenko, LIMO Lissotschenko Mikrooptik GmbH (Germany)

Published in SPIE Proceedings Vol. 7640:
Optical Microlithography XXIII
Mircea V. Dusa; Will Conley, Editor(s)

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