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Proceedings Paper

Development of molecular resists based on Phenyl[4]calixarene derivatives.
Author(s): Masatoshi Echigo; Hiromi Hayashi; Hiroaki Oizumi; Kazuyuki Matsumaro; Toshiro Itani
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Paper Abstract

We have developed negative-tone molecular resist based on C-4-cyclohexylphenylcalix[4]resorcinarene(MGR108) and positive-tone molecular resist based on protected C-4-isopropylphenylcalix[4]resorcinarene (MGR104P). Both MGR108 and MGR104P showed high solubility in both conventional resist solvents such as propylene glycol monomethyl ether and conventional alkaline developer of 0.26N TMAHaq. In this paper, we show current performance of resists by EB lithography (EBL) and EUV lithography (EUVL).

Paper Details

Date Published: 31 March 2010
PDF: 9 pages
Proc. SPIE 7639, Advances in Resist Materials and Processing Technology XXVII, 76392B (31 March 2010); doi: 10.1117/12.846475
Show Author Affiliations
Masatoshi Echigo, Mitsubishi Gas Chemical Co., Inc. (Japan)
Hiromi Hayashi, Mitsubishi Gas Chemical Co., Inc. (Japan)
Hiroaki Oizumi, Semiconductor Leading Edge Technologies, Inc. (Japan)
Kazuyuki Matsumaro, Semiconductor Leading Edge Technologies, Inc. (Japan)
Toshiro Itani, Semiconductor Leading Edge Technologies, Inc. (Japan)


Published in SPIE Proceedings Vol. 7639:
Advances in Resist Materials and Processing Technology XXVII
Robert D. Allen, Editor(s)

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