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Proceedings Paper

Deposition of polymer barrier materials by resonant infrared pulsed laser ablation
Author(s): S. M. Avanesyan; A. Halabica; S. L. Johnson; M. J. Kelley; J. M. Klopf; H. K. Park; K. E. Schriver; S. Singaravelu; R. F. Haglund
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Paper Abstract

We describe resonant infrared pulsed laser deposition (RIR-PLD) of cyclic olefin copolymer, a barrier and protective layer; for comparison, we describe RIR-PLD of polystyrene and poly(ethylene dioxythiophene) about which we already have significant knowledge. Film deposition based on resonant infrared laser ablation is a low-temperature process leading to evaporation and deposition of intact molecules. In this paper, we focus on deposition of this model barrier and protective material that is potentially useful in the fabrication of organic light emitting diodes. The films were characterized by scanning electron microscopy and Fourier-transform infrared spectroscopy. We also compared the properties of films deposited by a free electron laser and a picosecond optical parametric oscillator.

Paper Details

Date Published: 23 February 2010
PDF: 11 pages
Proc. SPIE 7585, Laser-based Micro- and Nanopackaging and Assembly IV, 758507 (23 February 2010); doi: 10.1117/12.846417
Show Author Affiliations
S. M. Avanesyan, Vanderbilt Univ. (United States)
A. Halabica, Vanderbilt Univ. (United States)
S. L. Johnson, Vanderbilt Univ. (United States)
M. J. Kelley, College of William and Mary (United States)
Thomas Jefferson National Accelerator Facility (United States)
J. M. Klopf, Thomas Jefferson National Accelerator Facility (United States)
H. K. Park, AppliFlex LLC (United States)
K. E. Schriver, Vanderbilt Univ. (United States)
S. Singaravelu, Thomas Jefferson National Accelerator Facility (United States)
Old Dominion Univ. (United States)
R. F. Haglund, Vanderbilt Univ. (United States)


Published in SPIE Proceedings Vol. 7585:
Laser-based Micro- and Nanopackaging and Assembly IV
Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio; Jun Amako; Willem Hoving, Editor(s)

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