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Proceedings Paper

Modeling, parameter estimation, and open-loop control of MEMS deformable mirrors
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Paper Abstract

We present a model for MEMS deformable mirrors (DMs) that couples a 2-dimensional, linear 4th order partial differential equation for the DM facesheet with linear spring models for the actuators. We estimate the parameters in this model using the method of output least squares, and we demonstrate the effectiveness of this approach with data from a 140-actuator MEMS test mirror produced at Boston University. A scheme for robust, computationally efficient open-loop control, which is based on this model, is also presented.

Paper Details

Date Published: 18 February 2010
PDF: 6 pages
Proc. SPIE 7595, MEMS Adaptive Optics IV, 75950E (18 February 2010); doi: 10.1117/12.846363
Show Author Affiliations
Curtis R. Vogel, Montana State Univ. (United States)
Glenn A. Tyler, The Optical Sciences Co. (United States)
Yang Lu, Boston Univ. (United States)


Published in SPIE Proceedings Vol. 7595:
MEMS Adaptive Optics IV
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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