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Proceedings Paper

Partial spatial coherence in an excimer-laser lithographic imaging system
Author(s): Arlene Smith; Anna Burvall; Christopher Dainty
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Paper Abstract

We have recently explored the Elementary Function method, previously presented by Wald et al (Proc. SPIE 59621G, 2005), and we have demonstrated under what circumstances this method can be used to reduce the propagation calculations of partially coherent light to two dimensions. In this paper, we examine the methods used to measure the spatial coherence of a light source in the literature. We present a method based on work previously shown by Mejia et al (Opt Comm 273 (428-434), 2007) which uses an array of pinholes with one degree of redundancy. We discuss the design of the pinhole array and present the results of some simulations.

Paper Details

Date Published: 3 March 2010
PDF: 5 pages
Proc. SPIE 7640, Optical Microlithography XXIII, 764029 (3 March 2010); doi: 10.1117/12.846349
Show Author Affiliations
Arlene Smith, National Univ. of Ireland, Galway (Ireland)
Anna Burvall, National Univ. of Ireland, Galway (Ireland)
Christopher Dainty, National Univ. of Ireland, Galway (Ireland)

Published in SPIE Proceedings Vol. 7640:
Optical Microlithography XXIII
Mircea V. Dusa; Will Conley, Editor(s)

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