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Proceedings Paper

Modeling of the nonlinearity in nano-displacement measuring system based on the neural network approaches
Author(s): Saeed Olyaee; Reza Ebrahimpour; Samaneh Hamedi; Farzad M. Jafarlou
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Paper Abstract

Periodic nonlinearity is the main limitation on the accuracy of the nano-displacement measurements in the heterodyne interferometers. It is mainly produced by non-ideal polarized beams of the leaser and imperfect alignment of the optical components. In this paper, we model the periodic nonlinearity resulting from non-orthogonality and ellipticity of the laser beam by using combination of neural networks such as stacked generalization method and mixture of experts. The ensemble neural networks used for nonlinearity modeling are compared with single neural networks such as multi layer percepterons and radial basis function.

Paper Details

Date Published: 21 October 2009
PDF: 8 pages
Proc. SPIE 7515, Photonics and Optoelectronics Meetings (POEM) 2009: Industry Lasers and Applications, 75150H (21 October 2009); doi: 10.1117/12.846348
Show Author Affiliations
Saeed Olyaee, Shahid Rajaee Teacher Training Univ. (Iran, Islamic Republic of)
Reza Ebrahimpour, Shahid Rajaee Teacher Training Univ. (Iran, Islamic Republic of)
Samaneh Hamedi, Shahid Rajaee Teacher Training Univ. (Iran, Islamic Republic of)
Farzad M. Jafarlou, Shahid Rajaee Teacher Training Univ. (Iran, Islamic Republic of)


Published in SPIE Proceedings Vol. 7515:
Photonics and Optoelectronics Meetings (POEM) 2009: Industry Lasers and Applications
Dianyuan Fan; Horst Weber; Xiao Zhu; Dongsheng Jiang; Xiaochun Xiao; Weiwei Dong; Desheng Xu, Editor(s)

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