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Proceedings Paper

Overlay sampling optimization by operating characteristic curves empirically estimated
Author(s): Kentaro Kasa; Masafumi Asano; Takahiro Ikeda; Manabu Takakuwa; Nobuhiro Komine; Kazutaka Ishigo
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Paper Abstract

Operating Characteristic (OC) curves, which are probabilities of lot acceptance as a function of fraction defective p, are powerful tools for visualizing risks of lot acceptance errors. The authors have used OC curves for the overlay sampling optimization, and found that there are some differences in probability of acceptance between theoretical calculation and empirical estimation. In this paper, we derive a theoretical formulation of the probability of acceptance for several simple cases by decomposing overlay errors, and show that the origin of the differences is the use of stratified sampling in overlay inspection.

Paper Details

Date Published: 1 April 2010
PDF: 9 pages
Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 76382G (1 April 2010); doi: 10.1117/12.846344
Show Author Affiliations
Kentaro Kasa, Toshiba Corp. (Japan)
Masafumi Asano, Toshiba Corp. (Japan)
Takahiro Ikeda, Toshiba Corp. (Japan)
Manabu Takakuwa, Toshiba Corp. (Japan)
Nobuhiro Komine, Toshiba Corp. (Japan)
Kazutaka Ishigo, Toshiba Corp. (Japan)

Published in SPIE Proceedings Vol. 7638:
Metrology, Inspection, and Process Control for Microlithography XXIV
Christopher J. Raymond, Editor(s)

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