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Proceedings Paper

Nanophotonic fabrication in sub-nm scale
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Paper Abstract

Nanophotonics, a novel optical technology, utilizes the local interaction between nanometric particles via optical near fields. The optical near fields are the elementary surface excitations on nanometric particles. Of the variety of qualitative innovations in optical technology realized by nanophotonics, this talk focuses on fabrication. A realization of an ultra-flat silica surface with angstrom-scale average roughness using noadiabatic optical near-field etching and repairing are demonstrated and its origin is discussed.­

Paper Details

Date Published: 26 February 2010
PDF: 8 pages
Proc. SPIE 7586, Synthesis and Photonics of Nanoscale Materials VII, 75860D (26 February 2010); doi: 10.1117/12.846328
Show Author Affiliations
Takashi Yatsui, The Univ. of Tokyo (Japan)
Motoichi Ohtsu, The Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 7586:
Synthesis and Photonics of Nanoscale Materials VII
Jan J. Dubowski; David B. Geohegan; Frank Träger, Editor(s)

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