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Proceedings Paper

Novel fine-tuned model-based SRAF generation method using coherence map
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Paper Abstract

We have developed the comprehensive sub-resolution assist features (SRAFs) generation method based upon the modulation of the coherence map. The method has broken through the trade-off relation between processing time and accuracy of the SRAF generation. We have applied this method to a real device layout and the average of Process Variation band width (PV band width) has improved to 40% without any processing time loss.

Paper Details

Date Published: 10 March 2010
PDF: 9 pages
Proc. SPIE 7640, Optical Microlithography XXIII, 764017 (10 March 2010); doi: 10.1117/12.846322
Show Author Affiliations
Katsuyoshi Kodera, Toshiba Corp. (Japan)
Satoshi Tanaka, Toshiba Corp. (Japan)
Mikiyasu Yamaji, Toshiba Corp. (Japan)
Chikaaki Kodama, Toshiba Memory Systems Co., Ltd. (Japan)
Toshiya Kotani, Toshiba Corp. (Japan)
Shigeki Nojima, Toshiba Corp. (Japan)
Koji Hashimoto, Toshiba Corp. (Japan)
Shoji Mimotogi, Toshiba Corp. (Japan)
Soichi Inoue, Toshiba Corp. (Japan)


Published in SPIE Proceedings Vol. 7640:
Optical Microlithography XXIII
Mircea V. Dusa; Will Conley, Editor(s)

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