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Proceedings Paper

Resonance MEMS mirrors design considerations
Author(s): S. Sourani
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Paper Abstract

Resonance MEMS mirrors are widely used today for many applications such as barcode scanners and personalprojectors. bTendo manufactures Personal Projection Engines on two types of mirrors: 1. Resonance mirrors for horizontal scanning 2. Linear mirrors for vertical scanning In this lecture we will discuss the "Energy Balance" and start-up conditions for resonance mirrors. We will derive the conditions for start-up as well as the predicted curve of θ(v): (see manuscript for equation) We will show simulation results in the time domain that prove the validity of the last equation. Finite element simulation could be used to calculate the comb capacitance and to predict the performance of a new structure.

Paper Details

Date Published: 17 February 2010
PDF: 9 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759409 (17 February 2010); doi: 10.1117/12.846272
Show Author Affiliations
S. Sourani, bTendo Ltd. (Israel)


Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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