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Proceedings Paper

Effect of target structure on interfering femtosecond laser processing
Author(s): Y. Nakata; T. Hiromoto; N. Miyanaga
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Paper Abstract

Top down technology of ultra-short pulse laser processing was applied to induce liquidly process and generate new nanostructures such as nanobump, bead-on-bump and burst structure. Bilayer thin film was used as a sample, and structure changed by the film formation. For example, Burst structure could be generated in the case of Au on Ag film structure. In the case of Ag on Au structure, only nanobump and bead-on-bump structure could be generated, and which is similar to single layer case.

Paper Details

Date Published: 18 February 2010
PDF: 6 pages
Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 75840H (18 February 2010); doi: 10.1117/12.845963
Show Author Affiliations
Y. Nakata, Osaka Univ. (Japan)
T. Hiromoto, Osaka Univ. (Japan)
N. Miyanaga, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 7584:
Laser Applications in Microelectronic and Optoelectronic Manufacturing XV
Hiroyuki Niino; Michel Meunier; Bo Gu; Guido Hennig; Jan J. Dubowski, Editor(s)

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